一種新型高回轉(zhuǎn)精度微主軸系統(tǒng)的整體設(shè)計(jì)及其結(jié)構(gòu)分析.pdf

1、湖南大學(xué)碩士學(xué)位論文一種新型高回轉(zhuǎn)精度微主軸系統(tǒng)的整體設(shè)計(jì)及其結(jié)構(gòu)分析姓名：伍立棟申請(qǐng)學(xué)位級(jí)別：碩士專(zhuān)業(yè)：機(jī)械制造及其自動(dòng)化指導(dǎo)教師：周志雄20050320一種新型高回轉(zhuǎn)精度微主軸系統(tǒng)的整體設(shè)計(jì)及其結(jié)構(gòu)分析AbstractInthisdissertationthehighrotaryaccuracybearingsusedinspindlesystemofsuperprecisionmachinesinexistencearementi

2、onedalsothedisadvantagesofthesebearingsusedfthemicrofabricationareanalyzed.basedontheanalysisofthetheyofflexturehingeanewmicrospindlesystemusedfthemicrofabricationisdesignedwhichincludedthewktheywholestructureofthemicros

3、pindlethentheprojecttriedtoapplyFiniteElementMethod(FEM)totheanalysisdesignofthestructureofthemicrospindle.Thebearingofthemicrospindleuseswholestructuralflexturehingetoensurethespindle’shighrotaryaccuracy.Firstthewholest

4、ructureofthemicrospindlesystemwasanalyzeddesignedthenWiththeFEMsoftwareANSYSthefiniteelementmodelofbearingwasbuiltaccdingtoitsstructuralacterwkconditionsthenstaticanalysiswasappliedtoit.Staticanalysisdeterminedthestresse

5、sdisplacementsinthebearingunderallstoftypicalwkconditions.Theresultofthestaticanalysisrevealedthatthestressofthebearingwaslowertothematerial’sallowablestressalsotheXYZtotaltravelofthecentrepointwasverysmalluptotherequire

6、mentsofthedesign.Asanimptantqualityindexthedynamicspecialtydeterminesthesecurityefficiency.Intheprojectthevibrationacteristics(naturalfrequenciesmodeshapes)ofthestructurewasdeterminedbyapplyingmodalanalysis.Italsocanbeas

7、tartingpointfanotheredetaileddynamicanalysissuchasatransientdynamicanalysisaharmonicresponseanalysisaspectrumanalysis.Thisprojectprovidedvaluableexplationconsultantfthefuturedesignofthemicromachineusedftheelectrochemical