多晶硅鑄錠爐操作維護說明書修改版最終版

1、1多晶硅鑄錠爐操作維護手冊操作維護手冊無錫開日能源科技股份有限公司無錫開日能源科技股份有限公司2011年3月3目錄1安全................................................................................................................................................................

2、.....51.1安全符號及說明.........................................................................................................................................51.2安全保護措施.........................................................

3、...................................................................................52設備規(guī)格...................................................................................................................................

4、..........................82.1設備的平面圖............................................................................................................................................92.2設備接口規(guī)格要求................................

5、..................................................................................................113設備概述...................................................................................................................

6、........................................113.1操作原理.................................................................................................................................................113.2系統(tǒng)構成.................

7、................................................................................................................................124.操作界面....................................................................................

8、.......................................................................144.1報警頁.............................................................................................................................................

9、........144.2主視圖.....................................................................................................................................................214.3曲線趨勢圖.............................................

10、................................................................................................244.4歷史數(shù)據(jù)庫查詢................................................................................................................

11、......................284.5模式頁.....................................................................................................................................................304.6主參數(shù)和系統(tǒng)配置頁...........................

12、...................................................................................................304.6.1主參數(shù)頁1.............................................................................................................

13、............................314.6.2主參數(shù)頁2..........................................................................................................................................314.6.3主參數(shù)頁3—水溫報警及加熱報警參數(shù)設置................

14、...................................................................324.6.4系統(tǒng)配置窗口......................................................................................................................................324.6.

15、5主參數(shù)溫度壓力PID分區(qū)參數(shù)配置表............................................................................................334.6.7慢抽程序參數(shù)設置窗口.............................................................................................

16、.........................334.7手動操作..................................................................................................................................................344.7.1熱偶倉檢漏............................

17、.............................................................................................................354.8手動維護屏幕....................................................................................................

18、......................................364.9運行干預操作.........................................................................................................................................384.10初始檢查窗口屏幕....................

19、............................................................................................................414.11配方屏幕......................................................................................................

20、.........................................444.12隔熱層手動升降屏幕............................................................................................................................454.13主加熱參數(shù)屏幕...........................

21、..........................................................................................................474.14手動下腔室升降窗口...................................................................................................

22、.........................475.爐子的具體操作...............................................................................................................................................485.1概述..................................

23、.......................................................................................................................485.2打開下腔室...........................................................................................

24、..................................................495.3取出長晶結束后的硅錠........................................................................................................................515.4進料過程..........................

25、.....................................................................................................................525.5選擇運行的配方及下載........................................................................................

26、................................535.6自動運行初始檢查屏..............................................................................................................................545.7自動循環(huán)過程.....................................

27、....................................................................................................546.設備維護................................................................................................................