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1、 ULTRA-SMOOTHNESS GRINDING OF GLASS WITH #140 METAL BOND DIAMOND WHEEL SAWA Takekazu 1 , YASUI Heiji 1 1 Dept. of Mechanical Engineering & Materials Science, Kumamoto University 2-39-1, kurokami, kumamoto, Japan A
2、bstract Glass is one of the most important materials in the optical industries. The high efficiency ultra-smoothness grinding technique of the glass has been strongly required. To improve the productivity, in our previ
3、ous researches, the newly devised ultra-smoothness grinding method is proposed. By applying the new method to the horizontal surface grinding1) ,2), 3), the surface roughness of cemented carbide tool, silicon carbide c
4、eramic and so on is found to attain below 30nm (Rz) or 5nm (Ra) in the measuring area of 256µm x 256µm. As a result, the new method is ascertained to be useful for finishing near the ultra-smoothness surface.
5、 In this report, ultra-smoothness grinding of a glass is examined. The specification of metal bond diamond wheel used is the grain size of #140 and the concentration of 50, respectively. The 3D surface roughness of gla
6、ss formed using the suitable grinding condition attains about 27nm(Rz) or 1.4nm(Ra). Key words ultra-smoothness grinding, glass, surface roughness, nanometer, diamond wheel, coarse grain size, metal bond 1 INTRODUCTIO
7、N Glass is one of the most important materials in the optical industries that act to support the precision industries. The high efficiency ultra-smoothness grinding technique of glass has been strongly required, since
8、the precision industry has been recently developing and the demand for glass component of high quality and low price has been increasing, To improve the productivity, in our previous researches[1], the newly devised ul
9、tra-smoothness grinding method is proposed1). By applying the new method to the horizontal surface grinding[2][3], the surface roughness of cemented carbide tool, silicon carbide ceramic and so on is found to attain be
10、low 30nm (Rz) or 5nm (Ra) in the measuring area of 256µm x 256µm. As a result, the new method is ascertained to be useful for finishing near the ultra-smoothness surface, and ascertained to be useful. This
11、 is one of a series of the researches on ultra-smoothness grinding of various kinds of materials. In this report, ultra-smoothness grinding of glass is examined using a metal bond diamond wheel of coarse grain size.
12、2 ULTRA-SMOOTHNESS GRINDING METHOD In our previous research[1], the possibility of the high removal rate ultra-smoothness grinding method which can finish to almost the same smoothness formed by polishing is examined
13、 using traverse grinding. It is found from the results that the smoothness, which can be Fig.1 Ultra-smoothness grinding method Fig.5 WYKO 3D image and 2D profiles of the glass surface ground by plunge grinding [Vg=12
14、m/s, vwp=0.01mm/s, t=5µm, Soluble type]ascertained by separate observation to be obtained over the ground whole workpiece surface of 10mm square Accordingly the grinding cracks are considered to decrease with th
15、e decrease of table speed. In addition, it is considered that the ductile-mode grinding is possible by slowing the table speed for using #140-mesh diamond wheel of coarse grain size. A WYKO 3D image and 2D profiles
16、of 256µm x 256µm square of glass surface ground at vwp=0.01mm/s in plunge grinding is shown in Fig.5. From the figure, it is found that the grinding grooves parallel to grinding direction are observed clear
17、ly on the surface. The height and pitch of grinding groove are about 500nm(P-V). The surface roughness parallel to grinding direction, on the other hand, is about 43nm(P-V). The 3D surface roughness of about 700nm(P-
18、V) is strongly influenced by the height of grooves. Then the height of grinding grooves is closely related to the maximum surface roughness. Considering the results, it is important to develop the new grinding metho
19、d that can repress or diminish the occurrence of grinding grooves. 4. ULTRA-SMOOTHNESS GRINDING Figure 6 shows the microscope and SEM photographs of the glass surface formed by ultra-smoothness grinding. As shown fro
20、m the figure, the smooth ductile-mode ground workpiece surface without grinding cracks and grooves is obtained. Especially it is important for ultra-smoothness grinding that the grinding groove is ascertained to occur
21、little on the workpiece. Figure 7 shows a WYKO 3D image and 2D profiles of 256µm x 256µm square of glass surface formed by ultra-smoothness grinding at fGn=10µm/rev and fp=10µm. It is found from the
22、 figure, the 3D surface roughness is about 27nm(Rz) or 1.4nm(Ra) and the 2D surface roughnesses parallel and normal to grinding direction are about 6.5nm(Rz) or 1.1nm(Ra) and about 8.2nm(Rz) or 1.3nm(Ra), respectively.
23、 Fig.6 Microscope and SEM photographs of glass surface by ultra-smoothness grinding [Vg=12m/s, fGn=10µm/rev (vwn=0.38mm/s), fp=10µm,t=5µm, Soluble type]SEM Microscope Grinding direction [Glass, Vg=12m/s
24、, t=5µm, Plunge grinding](c) vwp=0.1mm/s (d) vwp=1mm/s (b) vwp=0.05mm/s SEM Microscope (a) vwp=0.01mm/s SEM Microscope Grinding direction Grinding direction Grinding direction Grinding direction Grinding direction
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