砷化鎵單晶閾值電壓特性和自動(dòng)測(cè)試技術(shù)研究.pdf

1、合肥工業(yè)大學(xué)碩士學(xué)位論文砷化鎵單晶閾值電壓特性和自動(dòng)測(cè)試技術(shù)研究姓名：李傳海申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：微電子學(xué)與固體電子學(xué)指導(dǎo)教師：毛友德2001.1.1AbstractGaAsdevicesandcircuitshavegoodprioritiessuchashighspeed、lowpowerdissipation、wideoperationtemperatureandhighradiationhardnessoverSidevice

2、sandcircuits，andhavebeenwidelyusedinsatellitecommunication、optical—fibercommunication、superhighspeedcomputer、highspeedtestinstruments、mobilecotrmtunication，etcHoweveritisdifficulttoachievehighqualityGaAscrystalThequality

3、ofthematerialsrestrainsthedevelopmentofGaAsdevicesandcircuitsInthepast，thequalityofGaAscrystalisevaluatedbytheelectronmobility、resistivityanddislocationdensity，butintheprocessofexperiment，weoftenfoundthatthegoodcircuitsc

4、ould’tbemadefromexcellentmaterialsbutfromtheordinaryonesSoitiSunilateraltoevaluatethematerialqualitybythosethreematerialparametersItiSessentialtofurtherexplorethetruerelationshipbetweenGaAsmaterialsanddevicesInthispaper，

5、thedevicesparametersofthreekindsofGaAslogiccellcircuitswereextractedfirstly，accordingtotileStatzmodel，thentheintluenceonthetranstbrmcharacteristicswhentheVIn、h^、13andRsvaryseparatelywassinmlatedbythePspiceAccordingtother

6、esults，wefoundthatVthand0havegreatinfluenceonthetransformcharacteristicsofthecircuitsOntheotherhand，wecalculatedthecircuit’SrequirementontheunitbrmityoftheVthatdifferentyield、differentintegrityanddi腩rentlogiccircuitItwas

7、concludedthatonlywhentheuniformityoftheVtllreachedcmaainJevel，qualifiedGaAslCcouldbemadeSotileHaitbrmityoftheVlhcanrellecttherelationshipbetweenmaterialanddeviceitshouldbemadefurtherexploredWiIhtileresearch011theVth，larg

8、eamountofdatawilibemeasured，howeverthemeasurementsystemnowavailablerequirespeople’Soperation，notonlywastestime，vigor，butalsoIacksol、accuracy，itcould’tlittherequirementoftheresearchSowedevelopedtheauto—measurementsystemof

9、VthonthebasementofpreviousworkWiththesystem，highspeed、highaccuracymeasurementcanbeachievedWhenthesoftwareandhardwareareexpanded，otherGaAsmaterial’Sparameterscanbemeasured，itgivesawaytomakethoroughinquiryintotherelationsh