分步電鍍法制備FC-LEDs用Au-Sn凸點的研究.pdf

1、大連理工大學碩士學位論文分步電鍍法制備FCLEDs用AuSn凸點的研究姓名：米青霞申請學位級別：碩士專業(yè)：材料學指導教師：黃明亮王來20080606分步電鍍法制備FCLEDs用Au／Sn凸點的研究TheStudyofSequentialElectroplatingAu／SnBumpsforFCLEDsAbstractAlongwiththeincreaseofluminescenceefficiencyofLEDs，itWasestim

2、atedthatthedimensionsofmarketofwholeglobalHBLED(HighBrightnessLEDHB—LED)marketwillamountto9billionUSdollarsby2011，andwhitelightHBLEDsolidstatelightingwillbecametrueinthenearfutureHigherrequirementsweresubmittedtotheoptic

3、s，thermology，electricityandmechanicalstructureofthepackagingofLEDsInordertodecreasethethermalresistanceandincreasetheluminescenceefficiencyofthepackagingstructures，totallynewdesignproposalmustbeapplied。Sincetheflipchip(F

4、C)technologycouldimprovebothoftheluminescenceefficiencyandheatdissipationpotentialofLEDchips，F(xiàn)CpackagingforwhitelightHBLEDWaSoneofthehotspotsofresearchHowever，bumpingWasonecriticalstepinFCtechnologyThispaperwillfocusonth

5、ebumpingprocessAu—Sneutecticsolderwaschosenforthebumps，andsequentialelectroplatingwasadoptedtomanufacturethebumpsToachievegreenmanufacturing，traditionalcyanidegoldelectrolytesandtinsolutionscontainingfluorineandleadinthe

6、mwillmustbereplacedbygreensolutionsinthenearfutureAstablenoncyanideelectroplatingsolutionforgoldandanontoxicsolutionfortinwereworkedoutseparately，besides，theelectroplatingprocessandparametersweredecidedforbothofthesoluti

7、onsOnthisbasis，Au／Sndouble—layerstructureWassuccessfullyprepared111eresultsindicatedthat：1AstablenoncyanideelectroplatingsolutionforAuWasdeveloped，itCanbestablewhenthepH=6～9andtheelectroplatingtemperatureT=13“C～90“CItcon

8、sistedchieflyofNaAuCh2H20，Na2S03，ethylenediaminetetraceticacid(EDTA)AnelectrolytefortinWasdeveloped，too，itschiefingredientswereSnS04，K4P2073H20andC6H806ThiselectrolytefortinhadthebestcombinationpropertywhenitspHvaluewas8

9、0Puregoldandpuretinbumpsweresuccessfullyprepared2Thegrain(minorparticle、sizeandtheroughnessofthefilmsurfaceincreased、析tlltheincreasingtemperature，SOdidthegrowthrateofthedepositedfilms3Iftheotherparameterswerefixed，suchas