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1、RecentDevelopmentsinAESXPStheirApplicationsinMetalsWANGDAOYUAN1IWAIHIDEO1（1.ULVACPHIINC.370EnzoChigasakiKanagawa2538522Japan）AbstractThispaperreptsrecentdevelopmentsinAES(AugerElectronSpectroscopy)XPS(XrayPhotoelectronSp

2、ectroscopy)theirapplicationsinmetals.InAEStheacousticenclosureisintegratedtoeliminatetheimagejitterimagedriftfromtheenvironment.TheAESspatialresolutionof10?m)whichcouldbemeasuredwithinanhourduetotheimprovementintheArgoni

3、onguntherelatedsoftwaremultichanneldetect(32channels).AnotherimprovementinXPSisadepthprofilingofpolymerfilmsbyC60ionbeamsinwhichthechemicalstateswillbemaintainedafterC60ionbeamsputtering.Furthermesomeofthehardwaredevelop

4、mentapplicationsinmetalsusingAESXPSsuchasnanoprecipitate(lessthan50nm)depthprofilingfthickmultilayersetc.willbediscussedindetail.Keywds：AESXPSspatialresolutionnanoprecipitatedepthprofilingC601.IntroductionThedemfhighmagn

5、ificationAugermeasurementsofsemiconductmetalmaterialsisincreasing.RecentlytheintegrationofaSchottkyfieldemitteramultichanneldetectintotheelectronenergyanalyzerhasmadeasignificantimprovementinspatialresolutionsensitivityf

6、AESanalysis[1].TheSEI(SecondaryElectronImage)spatialresolutionofcommercialinstrumentshasbeendemonstratedbelow5nmhoweverthemagnificationinAugermeasurementssuchaslinescansmappinghasbeenlimitedbelow100000XwithAESspatialreso

7、lutionexceeding10nm.TheAESspatialresolutionisdegradedbyelectronbeamsizebroadeningassociatedwithlargerbeamcurrentsfAESmeasurementsbyAugersignalsgeneratedbybackscatteredelectrons[2].Inadditiontheelectronbeamjitterdriftwith

8、respecttothesample(socalledimagejitterdrift)iseasilyobservedathighmagnificationmeasurementduetothelongeracquisitiontimeofAugermeasurementscomparedtothatofSEI.ToavoidthisproblemwehavedevelopedanAESinstrumentnamedthePHI700

9、whichisisolatedfromenvironmentalaffectssuchasacousticnoiseaircirculationthedriftofroomtemperature.ThedemfimprovedspatialresolutioninXPSisalsoincreasing.XPSspectroscopyspatialresolutionislimitedtoaround9?minpresentcommerc

10、ialinstruments[3].BesidesimprovementsinspatialresolutionrecentdevelopmentsinXPSincludeasignificantFig.1DrawingofnewAESinstrumentwithanacousticenclosure.Fig.2AuMNNlinescanovergoldoncarbonmeasuredwitha20kV1nAelectronbeamis

11、overlaidontheSEI.Acquisitiontimewas33minutes.MaintenancedoDotoaccesstothesampletransferIonPumpSFEElectronGunCMAIonGunSampleParkingStageMaintenancedoDotoaccesstothesampletransferIonPumpSFEElectronGunCMAIonGunSampleParking

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