基于離子刻蝕的石英晶振頻率微調(diào)技術(shù)研究.pdf

1、蘇州大學碩士學位論文基于離子刻蝕的石英晶振頻率微調(diào)技術(shù)研究姓名：陳強申請學位級別：碩士專業(yè)：電子與通信工程指導教師：劉家勝201110英文摘要摹十離子刻蝕的“英品振頻率微調(diào)技術(shù)研究QUARTZCRYSTALFREQUENCYTRIMMINGTECHNOLOGYRESEARCHBASEDONIONETCHINGABSTRACTQuartzcrystaloscillatorisakindofcrystaloscillatorwhichism

2、adebasedonthepiezoelectriceffectofcrystalItischaracterizedinhighstabilityhighprecisionandlowpowerconsumption，thusithasbeenwidelyusedinavarietyofelectricappliancesInrecentyears，anumberofmanufacturingenterprisesmakeeveryef

3、forttoachieveagreatSuccessinthefiercemarketcompetitionbyconstantlyameliorateandimprovethepropertiesofproductsandcutdownthecostofproductionThispaper’studiesthefineadjustmentontheionetchingfrequencyofquartzcrystaloscillato

4、rbydiscussingtheionetchingtechniqueBasedonexperiments，itultimatelydefinesthesettingmethodofetchingrateinthefrequencyprocessingofionetching，SOastoimprovetheprocessingtechniqueoffineadjustmentontheionetchingfrequencyThusth

5、eprocessingefficiencyandthequalityofproductscanbeimprovedsignificantlyThemainresearchachievementsinthispaperincludes：1itstudiestherulesoffrequencydeviationcausedbyionetchingintheexperiment，andbasedonthis，italsodefinesthe

6、specificsettingmethodforetchingrate；andtheoptimaletchingratehasbeenfiguredoutaccordingtothestatisticaldataintheexperiment2Bythecomparisonoftheactualetchingratewiththegivenetchingrate，theconfurnationmethodfortheworkingcon

7、ditionofiongunhasbeenachieved，inordertOfindanyunusualcircumstancestimelyandtomaintenanceandrepairtheiongunTheprocessingefficiencyandthequalityofproductsintheprocessoffineadjustmentontheionetchingfrequencycanbeimproveddir