激光偏轉掃描系統動態(tài)聚焦模塊的研究.pdf

1、目錄摘要.…，.................................……，............................................……，……，.........……日第一章緒論..........................……，...............................……，...................................……11.1國外工業(yè)激光

2、加工現狀與趨勢..............................……，...........................……11.2國內工業(yè)激光加工現狀與趨勢............……，....……，..................................……31.3本文的主要研究內容.......................……，.....................................

3、.............……41.4本文的章節(jié)安排........................................................................................……5第二章激光加工系統......................................……，...............................................……62.1

4、激光加工方式...……，.................................................................……，.....……62.2激光偏轉掃描系統特點...................……，..................................................……82.3激光偏轉掃描系統原理...............................

5、.............................................……9第三章動態(tài)聚焦模塊..........................................................................................……123.1誤差產生及其補償機理........................................................

6、................……123.2動態(tài)聚焦模塊光學系統..........................................................................……153.3動態(tài)聚焦模塊機械結構..........................................................................……173.4PSD伺服控制........

7、.....................................……，.......................................……193.5動態(tài)聚焦運動控制..................................................................................……22第四章系統控制算法及圖形校正..........................

8、..............................……，.......……254.1掃描控制算法……，.................................................................................……254.2圖形校正.......................................……‘..................……，.........

9、.................……26第五章控制模塊..................................................................................................……315.1激光器的控制模式...................................……，........................................…

10、…315.2控制軟件模塊及接口硬件....................................................................……325.3RTC4運動控制卡..............................……，................................................……36第六章成果應用及今后的打算.....................

11、.....................................................……40參考文獻................................................................................................................……41致謝.........................................

12、.......................................................................……43AbstractLaserwithhigheoherenee，direetion，highintensityeharaeteristies，it15easytoobtainahighfluxdensity，theintensityoftheIaserbeamfoeustothemedia，

13、theuseoflaserbeaminteraetionwithmattertoehangethenatureofthematerialProeess，whieh15laserProeessing.LaserProCeSSingteChnologywiththeOPtiCal，eleetriealandmeehanieal，materials，eomPuters，eontrolteehnologyhasgraduallydeVeloPe

14、dintoanewProeessingteehnology.WideobjeCtwithaProeessinglaserProCessing，deformation，highPreeision，energysaving，lessPollution，remoteProeessing，automatedProeessingandother5igni行eantadvantages，toimProveProduetqualityandIabor

15、Produetivity，Proeessautomation，eliminatePollution，redueematerialeonsumPtion，ete.inereasinglyimPortantrole.LaserProeessingareusedineleetronies，automotive，maehinerymanufaeturing，ironandsteelmetallurgy，Petroleum，Iightindust

16、ry，medjealequiPment，Paekaging，giftindustry，watehes，』ewellery，elothing，eosmeties，tobaeeo，aerosPaeeandotherindustrjes，andinereasingrangeofaPPlieationsexPansionofthelaserdrilling，laserteXture，lasereutting，laserwelding，laser

17、treatment，Iasermarking，laserengraVing，and50hasbeenwidelyUSed.High一Powerlaserbeamscanningsystem15anewgenerationofindUStrialgradehighPowerIaserProeessingsystemintheadvaneedmanUfaeturingindustrykeytothesueeessofaPPlieation，

18、thesystemeanmaxirnizethee幣eieneyoflaserProeessingsPeed，intelligeneeandotheradvantages.ComPuter一eontrolledhigh一PowerIaserbeamsPeed，high一PreeisionIaserde們eetionseanningteehnology15eurrentlytheworldwideindustrylaseraPPlieat

19、ionoftheIatesttrends.FoCUSingthelaserbeamSCanningteChn0I0gy15adynamiehigh一sPeed，highe偉eieney，thekeyProeessing.LaserProeessingsystemhasbeenthetraditionalmanufaeturingindustriesean’tmeettheraPid，e衍Cient，月exibleandIOWrunnin

20、geostsneeds.ForhighPowerlaserProeessingsystemofdomestiedemandgrowthandthe1imitationsinthePraetiCalaPPliCationofresearehanddevel0Pmentoftheintelligentmodulebasedondynamiefoeusforlaserde月eetionseanningsystem.A「oundthenewge

21、nerationofhighPOWerlaserPr0CeSSingSysterninthemodernaPPliCationofadvaneedmanu伯eturing，high一POWerlaserbeamtoCarryoutdynamiCfoCusingdefleCtionSCanningteehnologyreseareh，researehtargetingthekeymodUleSindynamiefoeusing.Key、甲