激光偏轉(zhuǎn)掃描系統(tǒng)動態(tài)聚焦模塊的研究.pdf

1、目錄摘要.…，.................................……，............................................……，……，.........……日第一章緒論..........................……，...............................……，...................................……11.1國外工業(yè)激光

2、加工現(xiàn)狀與趨勢..............................……，...........................……11.2國內(nèi)工業(yè)激光加工現(xiàn)狀與趨勢............……，....……，..................................……31.3本文的主要研究內(nèi)容.......................……，.....................................

3、.............……41.4本文的章節(jié)安排........................................................................................……5第二章激光加工系統(tǒng)......................................……，...............................................……62.1

4、激光加工方式...……，.................................................................……，.....……62.2激光偏轉(zhuǎn)掃描系統(tǒng)特點...................……，..................................................……82.3激光偏轉(zhuǎn)掃描系統(tǒng)原理...............................

5、.............................................……9第三章動態(tài)聚焦模塊..........................................................................................……123.1誤差產(chǎn)生及其補償機理........................................................

6、................……123.2動態(tài)聚焦模塊光學(xué)系統(tǒng)..........................................................................……153.3動態(tài)聚焦模塊機械結(jié)構(gòu)..........................................................................……173.4PSD伺服控制........

7、.....................................……，.......................................……193.5動態(tài)聚焦運動控制..................................................................................……22第四章系統(tǒng)控制算法及圖形校正..........................

8、..............................……，.......……254.1掃描控制算法……，.................................................................................……254.2圖形校正.......................................……‘..................……，.........

9、.................……26第五章控制模塊..................................................................................................……315.1激光器的控制模式...................................……，........................................…

10、…315.2控制軟件模塊及接口硬件....................................................................……325.3RTC4運動控制卡..............................……，................................................……36第六章成果應(yīng)用及今后的打算.....................

11、.....................................................……40參考文獻................................................................................................................……41致謝.........................................

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