離子輔助沉積對薄膜特性的影響.pdf

1、浙江大學(xué)碩士學(xué)位論文離子輔助沉積對薄膜特性的影響姓名：張德景申請學(xué)位級別：碩士專業(yè)：光學(xué)工程指導(dǎo)教師：顧培夫20040228碩士生畢業(yè)論文_。_。_。___——‘_。。。_。_—__。。。____。。?！?，。。。___。。。。‘—，—’。。_。。。?！?’———一ABSTRACTInthisdissertation，thinfilmsaredepositedonK9glasssubstratesusinganebeamgun

2、evaporationwithtowenergyoxygenionassisteddeposition(1AD)fromallendHallionsourceAcomparisonoftheopticalandmechanicalperfoHIlanceismadebetweenwithIADandwithoutIADTheresearchedthinfilmsincludesmonolayerthinfilmsandmultilaye

3、rthinfilms1TheresearchofmonolayerthinfilmsInthepaper，Tllreemololayerthinfilms—Ti02、Ta20s、Nb205oxidedielectricthinfilmsarestudiedAcomparisonoftheopticalandmechanicalperformanceismadebetweenwithIADandwithoutIADTheopticalpe

4、rformancesincludetherefractiveindex、theextinctioncoefficient、thepackingdensity、thevaccum—toairshiftandtheAFMimagesofthesurface；ThemechanicalperfomlancesincludetheadhesionandthehardnessWeobservethatfilmsdepositedwithiolla

5、ssistaremuchmoreprofitablethanthosedepositedwithoutionassistTheIADincreasesthepackingdensityofNb205filmsbv14％，hencetherefractiveindexarisesfrom203upto218andtheadhesionarisesfromaboutl107N／m‘to1297107N／m2：ThejADincreasest

6、hepackingdensityofTa205filmsby13％，hencetherefractiveindexarisesfrom203upto223；TheIADincreasesthepackingdensityofTi02filmsby20％hencetherefractiveindexarisesfrom203upto2372TheresearchofmultilayerthinfilmsZnS／MgF2、Nb20flSi0

7、2、Ti02／Si02narrowbandinterferencefiltersaredepositedby1ADwithanend—hallionsourceComparedtothespecimensproducedbyconventionalprocessdeposition，wediscoverthatspectralshift(A^)ofthefilterisreducedobviouslybyusinglADThetypie

8、alresultshowsthatthespectralshiftofZnS／MgF2narrowbandinterferencefiltersislessthan05nmTheformulaforestimatingpackingdensityofthefilmswasputforwardintermsofthemeasuredAXandthepackingdensityofMgF2layersinthefilterswascalcu

9、latedThecalculateddensityofMgF2withlADwaSincreasedfrom0，70forconventionalprocessto097MeanwhilewefindthatthespacerlayerhasagreatinfluenceonthespectralshiftThefurtherthelayersareawayfromthespacerthelesstheeriect；Inthesamew

10、ay，theIADreducesthespectralshiftofNb205／Si02narrowbandinterferencefiltersfrom294rimto124nm；The1ADreducesthespectralshiftofTi02／Si02narrowbandinterference丘Itersfrom247nmto84rimInconclusion，weobservethatbothmonolayerthinfi