大直徑晶體內(nèi)圓高精度切割關(guān)鍵技術(shù)研究.pdf

1、華中科技大學(xué)碩士學(xué)位論文大直徑晶體內(nèi)圓高精度切割關(guān)鍵技術(shù)研究姓名：靳永吉申請學(xué)位級(jí)別：碩士專業(yè)：機(jī)械工程指導(dǎo)教師：易傳云20060426華中科技大學(xué)碩士學(xué)位論文AbstractAccordingtomeactualneedofourcoun奶7ssemiconductormaterialsandspecialtypematerialscumr培，thisp印ergivestllemeⅡlodsandsemedmeasuresofimpm

2、vingt11ecuttingprecisionforthebigdiameteri衄er_circleFirstly，thepaperresearcheson廿1edynamicpropertyofinnercirclecutting：forceaIlalysisofthecrystalhavethreeaspectsoftbecuttingforcebet、veencry咖laIldbladeedge，thccircumferent

3、ialforceatatangenttobladeedgeandthevibratingforceofmeverticalbladeAccordingto廿1edyn鋤jcaIla】ysis，crystalalwaysbearsⅡ】ebladesno瑚alvjbratingforcewhichresultsfbmmainspindlejuInpilless，andthevibratingforceisanimponantelemento

4、finnuencingcrystalsbending，plallenessandrougIlIlessbecause也ecu仕inglinearVelocityisverylli曲Somepaperputsforwardawaytousecrystalautomatictrackingcorrectingsystemw11ichcanreducethebladesvibratingfbrce，correctt11evibratingpe

5、rfb廿nancep猢eterandimprovemecuttingprecision趾dnleslicequalitySecondly，itaIlalyzesprecisionandrigidnessofmerevolviIlgmainspindleandgivesthecorrespondingmeasures，soastomakemainspindlehavehighlydynamicaIldstaticrigidnessa11d

6、excellentheatbalancestnlctureⅥmichcanreducetheaXialandradialjumpinessofmainspindle，Deducethe塒ativevibrationbet、veenbladewoddngsu幽ceandcrystalprocessingsurfke，reducemeimpactforcegivenbythebladetothec刪ingmaterialsurf犯e，and

7、alseducenyingslices，矗agmentS卸dbladeripplesduringmecuttingofcrystalmaterialsThirdly，itanalyZestheinfluencegiVenbybladeandpmcessedmaterialstoslicec刪ingprecision，a11dconsiderst11atbladesh印e，blade西ndingmaterialsa11dprocessed

8、materialsareimpommtfactorsinnuenc血gthecuttingprccisionGenerally，meShapeofbladeismadelikethesh印eof“ppingwatcr，becauseitdoesgoodtotllec001ingofblade，tbeitnpact五Mcetocutdngbladeissmall，anditcanlengthenmebladesusingdme111eto

9、u曲ermecumngmaterialis，mesmallerthedi鋤ond伊anuleofbladeedgeisandtbesmallerthecu劬培velocityis；viceversaDi虢rentmaterialsusedi位reIItcu“ingvelocities，wIlichhavcindi丘henti11fluencesonthecuttingslicesbending，planenessandroughness