氮化碳基薄膜制備及其水溶液中的摩擦學(xué)特性研究.pdf

1、南京航空航天大學(xué)碩士學(xué)位論文氮化碳基薄膜制備及其水溶液中的摩擦學(xué)特性研究姓名：岳賓申請學(xué)位級別：碩士專業(yè)：機械設(shè)計及理論指導(dǎo)教師：周飛20090301氮化碳基薄膜制備及其水溶液中的摩擦學(xué)特性研究IIAbstractCarbonnitridebasedfilmssuchasBCNSiCNaCNxfilmsweredepositedbyusingionbeamassistantdeposition(IBAD).Thechemicalbond

2、ingstructurecompositionofthefilmswereanalyzedusingFouriertransfminfraredspectroscopy(FTIR)laserRamanspectroscopyXrayphotoelectronspectroscopy(XPS)respectively.Themechanicalpropertiesofthefilmswereevaluatedbynanoindentati

3、onteststhesurfaceroughnesswasmeasuredbyusingnoncontactsurfaceprofilometer.Atthesametimethetribologicalpropertiesofthecarbonnitridebasedfilmsinaqueoussolutionwerestudied.ThewnsurfaceonSiCballaCNxfilmswereobservedbythreedi

4、mensionalvideomicroscopeopticalmicroscoperespectively.ThreedimensionalsectionalmphologiesofthewearscarsonaCNxfilmswereobservedaswellastheirwearvolumesweremeasuredbyusingnoncontactsurfaceprofilers.Severalbondingstatessuch

5、asB(Si)–CB(Si)–NC–NC=NC=ChybridizationintheBCN(SiCN)filmswererevealedwhilethemajchemicalbondingoftheaCNxfilmsweresp3CNsp2C=N.Meoverallthefilmsshowedasmoothsurfacewithexcellentmechanicalproperties.TheBCN(SiCN)filmshadtheh

6、ighesthardnesselasticitymodulusof28.4228.5GPa(29.0227.4GPa)withlowerroughnessof5.2nm(10.9nm)whentheassistingionbeamenergywas200eV(300eV)theassistingionbeamcompositionwas0.5(0.5).ThefrictioncoefficientofBCNSiCNfilmsslidin

7、gagainstSi3N4ballinwaterlubricationwas0.0010.05respectively.FurthermetheaCNxfilmshadthehardnesselasticitymodulusof29330GPawitharoughnessof25nm.IncoolantlubricationtheaCNxfilmsshownaverylowfrictioncoefficientthespecificwe

8、arofSiCballaCNxfilmsvariedatround106mm3Nm1010mm3Nm.Whentheconcentrationoftheethanolbased(glycolbased)coolantwasat20%(10%)thefrictioncoefficientofaCNxfilmwas0.025(0.019).Thetribologicalpropertiesfthecarbonnitridebasedfilm