層狀鈣鈦礦型bi,3.15nd,0.85ti,3o,12鐵電薄膜的擇優(yōu)取向生長和電學特性研究

1、學號圣塑翌塹研究類犁叁塑堡窒⑧塑北Z‘薌夏鬈糯翻蜃罄黲黌溪’戮碩士學位論文學科門類—謄朦辮據(jù)蜃釋’黲堡強麟赫工學學科專業(yè)——蘭墜璺!堂魚墮竺墾!堂指導教師，哆尊譬終研究生劉曉林論文題目堡塑魚墮型塾墮塑墮墮里鯉堡箜墾薄膜的捍：優(yōu)取向生長和電學特性硼皖答辯日期：二OO六年五月三十日AbstractBi3，lsNdo85Ti3012(BNdT)thinfilmsoftwodifferentpreferredorientationsweregr

2、ownonstandard—type(111)Pt／WSiOz／Si(100)substratesthroughasol—gelprocess。Thevolumefractionof(104)／(014)orientedgrainsinthefilmswasestimatedtobeabout65％and50％ofcadsorientationgrainsaccordingtotheirxraypolefiguresThefilmswi

3、th(104)／(014)orientationconsistofcolumnargrainsofabout100200nminlateralsize，whereasthelattercontainequiaxedfinegrainsof50150nmindiameterThepreferrednucleationofthe(104)／(014)orientedgrainsonPtelectrodeisprobablyduetother

4、apidincreaseofthermalstress采highheatingratewhichmighttnodifytheinterfaceenergyWea／sofoundthatusingathinsingle—annealedlayerisfavorabletoincreasethevolumefractionofthe(104)／(oi◇orientedgrainsThenucleationisdisturbedineach

5、thinsinglewannealedlayerandthusthecrystalcontinuityalongthefilmthicknessdirectionisimproved。Anisotropicferroelectricandpiezoelectricpropertieshavebeendetermined，witharemnantpolarization2Pr《464MC／cm2andapiezoelectriccoeff

6、icient如3of17pm／Vinapredominantly(104)／(014)orientedfilm，butonly2／=167#C／cm2，d33=5pm／VinapredominantlycaxisorientedfilmThesevaluessuppoathosefindingsthatthemajorpolarizationdirectioninBNdTliesalongthe拉axisBNdTthinfilmswit

7、hpredominant(001)orientationonNb—dopedSrTi03000)andwitha／baxisorientation，(119)一orientedandrandomorientationonNbdopedSrTi03(110)werepreparedthroughasol—gelprocessAnisotropicferroelectricpropertieshavealsobeendetermined，w

8、itharemnantpolarization2只of80#C／c∥inapredominantlycaxisorientedfilm，but2Pr=262#C／cm2inthemixtureorientatedfilmsThemixtureorientedBNdTthinfilmsincludinga／baxisoriented，(119)一orientedandrandomorientationgrainsdepositedOilS