pbzr,0.4ti,0.6o,3鐵電電容器的集成研究

1、河北大學碩士學位論文PbZrTiO鐵電電容器的集成研究姓名：趙敬偉申請學位級別：碩士專業(yè)：凝聚態(tài)物理指導教師：劉保亭20100501Abstract IIAbstract PZT ferroelectric capacitors with different electrodes and substrates have been successfully fabricated, in which PbZr0.4Ti0.6O3 (PZT)

2、 ferroelectric thin films were prepared by sol-gel method and film electrodes like FePt and Pt are made by magnetron sputtering. Moreover, ferroelectric-ferromagnetic composite thin films have been fabricated with diffus

3、ion barrier layer prepared by magnetron sputtering. X-ray diffraction (XRD) has been used to examine the microstructure and morphology of the samples. Ferroelectric properties, dielectric constant, leakage current and fe

4、rromagnetic properties have been investigated by Precision Materials Analyzer (Precision LC Unit), Precision LCR Meter, Keithley System Source Meter and vibrating sample magnetometer (VSM), respectively. The article cons

5、ists of three parts. Impacts of the substrates on the structural and ferroelectric properties of the La0.5Sr0.5CoO3/Pb(Zr0.4Ti0.6)O3/La0.5Sr0.5CoO3 (LSCO/PZT/LSCO) ferroelectric capacitors have been investigated. It is f

6、ound that the LSCO/PZT/LSCO ferroelectric capacitor grown on glass substrate possesses better ferroelectric properties than that on Ti-Al/Si substrate. The remnant polarization (Pr) and coercive voltage (Vc) of the ferro

7、electric capacitor grown on glass substrate are ～28 μC/cm2 and ～0.96 V, respectively. Meanwhile, Pr and Vc of the ferroelectric capacitor on Ti-Al/Si substrate are ～25 μC/cm2 and ～1.05 V, respectively. XRD result shows t

8、hat both PZT films on two kinds of substrates are perovskite and well crystallized. The differences of structural and ferroelectric properties between FePt/PZT/Pt and Pt/PZT/Pt capacitors have been studied. XRD result s

9、hows that PZT in both capacitors are well crystallized. It is found that PZT capacitor with FePt top electrode possesses better fatigue-endurance and lager dielectric constant compared with PZT capacitor with Pt top elec

10、trode. Up to 109 switching cycles, the FePt/PZT/Pt capacitor, measured at 50 kHz, with polarization decreased by 57% is superior to the Pt/PZT/Pt capacitor by 82%, indicating that even an intermetallic FePt top electrode