細長金屬管內(nèi)產(chǎn)生的直流輝光放電等離子體及其初步應用研究.pdf

1、大連理工大學碩士學位論文細長金屬管內(nèi)產(chǎn)生的直流輝光放電等離子體及其初步應用研究姓名：尹利勇申請學位級別：碩士專業(yè)：等離子體物理指導教師：溫小瓊20070622細長金屬管內(nèi)產(chǎn)生的直流輝光放電等離子體及其初步應用研究AstudyonDCglowdischargeplasmageneratedinsideametallictubeanditspreliminaryapplicationAbstractImprovingthehardness，

2、wearresistance，corrosionresistanceoftheinnersurfaceofmetallictubeshaspotentialapplicationinindu啦fialpracticeWeproposedanormalDCglowdischargemethodfortheinnersulfaeenitridingofstainlesssteeltubeswithinnerdiameterof10mmAco

3、axialelectrodestructurewasconstructedbycoaxiallystretchingamngst姐wireasananodeinsideofstainlesssteeltubeSteadyDCglowdischargeplasmacanbegeneratedinthestainlesssteeltubebyapplyinganegativeDChighvoltagetothetubeThentheions

4、intheplasmawillbeacceleratedandthenimplantedintotheinnersurfacebytheapplyinghighvol：lage，Inthiswork，wepresentoBlstudyOrK(1)PlasmagenerationAcoaxialelectrodeswasconstructedbycoaxiallystretchingatungstenwireinsidethemetall

5、ictubeDCdischargeplasmawasgeneratedinsidethetubebyapplyinganegativedehi班voltagetothetubeItwasfoundthatthelengthoftheplasmadependsontheapplieddevoltage，andincreaseslinearlywhiletheappliedvoltageincreasesThevoltage—current

6、characteristicofthedischargeshowsthattheplasmageneratedinsidethestainlesssteelmbearenormalDCglowdischarge(2)DiagnosisoftheplasmabyopticalemissionspectroscopyThediagnosisoftheplasmgeneratedinsidethestainlesssteeltubewaspe

7、rformedbyopticalemissionspectroscopymethodTheactivespeciesintheplasmawasidentifiedThedependenceoftheintensityofactivespeciesongasratiosandpressurewasstudiedTheelectronexcitationtemperatureoftheplasmaandvibrationaltempera

8、tureofnitrogenmolecularintheplasmawasestimatedbyBoltzmannplotmethodThedependenceoftheelectronexcitationtemperatureandmolecularvibrationaltemperatureonthegasratiosandpressurewasinvestigated(3)Thepreliminarystudyoninnersur

9、facenitridingofAISl304sts伽esssteeltubesTheAISI304samplesafternitridingbytheplasmaofArN2mixturewereanalysizedbyAugerelectronspectrometer∞正s)，XraydiffYaetion(XRD)andmicrohardnesstesterThepreliminaryresultsshowthatthenormal