轉動豎直微鏡的硅微機械光開關研究.pdf

1、中國科學院上海微系統(tǒng)與信息技術研究所碩士學位論文轉動豎直微鏡的硅微機械光開關研究姓名：楊藝榕申請學位級別：碩士專業(yè)：微電子學與固體電子學指導教師：王躍林20040211ABSTRACTStudyonMEMSOpticaISwitchBasedorlVerticaITorSionaIMicromirrOFYangYirong(MicroelectronicsandSolidStateElectronics)Directedby：WangY

2、uelinAbstractInthisthesisanovellx2opticalswitchwasproposedwhichiSbasedonaverticaltorsionalmicromirrorMicromirrorwasfabricatedwith(1lO)orientedsiliconwaferbywetetchingtechnologyMicroactuatorwascomposedofacantileverandVari

3、able—gapelectrodesTheopticalcouplingwascarriedoutbyaddingapairofballlensbetweenfibersTheopticalswitchdevicesweredesignedandmadeThelossofMEMSopticalswitchusingdirectfibercouplingisbigHowevertheoptical10SScanbereducedafter

4、theopticalbeamiScollimatedInthethesis，balllcriseswereaddediusttocollimatethebeamTheinfluencedfactorswereanalysedindetailThereflectedfilmwithhi吐coefficientwasapartofmicromirrorsThereflectedcharacteristicswasealculatedonme

5、talmaterialstofindoutthataluminumandgoldarethebestchoicesTheirsaturatedreflectivityisuDto97％andthethicknessisabout200nmIntherangeofmoderateincidentanglesthedifferencedependentonpolarizationiSlittleAngledeflectioniSaneffe

6、ctiveoperationonoptics，whichiSwidelyusedinopticalswitchandvariableopticalattenuatorInordertolowerthedrivingvoltageofafixed—gascapacitortheedgeofelectrodesweredesignedandfabricatedwithcu_rvesTheDCvoltageandfrequencyrespon

7、dsweresimulatedBasedonthecalculations，theactuatorandfixingspringweredesignedTheactuatorwasusedtosteertheopticalbeamandthespringwasusedtofixthefiberAverticalmicromirrorwithhighsurfacequalitywaswetetchedon(110)orientedsili

8、conwangwhichwasofsignificanceinopticaldevices，TheactuatorwasfabricatedmainlybydeepreactiveionetchingtechnologyThepull—involtagesoftheactuatorweretestedabout69Vand73vrespectivelywhichwerewellagreedwiththesimulatedresults，

9、Thelossofthedevelopedopticalswitchwastestedabout45dB，andthecrosstalkwasabout45dBTheresultsshowthattheopticaldevicecanperformthefunctionAsonepartoftheachievements“Micro—Opto—Electro—MechanicalSystems(MOEMS)keytechnologies