二元光學元件的激光直寫及光刻技術的研究.pdf

1、浙江大學碩士學位論文二元光學元件的激光直寫及光刻技術的研究姓名：吳劍申請學位級別：碩士專業(yè)：光學工程指導教師：沈亦兵2001.3.1浙江大學碩士學位論文AbstractThedevelopmentofbinaryopticsandthemainmethodsusedformanufabricationareintroducedinthisthesisParticularlythetechniquesoflaserdirectwritin

2、gandphotolithographyareanalyzedindetailLaserdirectwritingisanovelfabricationmethodforbinaryopticalcomponentsThecontrolforlaserintensityinthelaserdirectwritingsystem(LOWS)ismainlydiscussedinthethesisFortheresponsedelayofa

3、cousto—opticmodulator(AOM)，themeasuresofsettingaelectricshutteronthelightpathanddesigningsuitablecontrollogicarecompletedtokeeptheAOM’SdelaytimeoutoftheexposureprocessThefabricationerrorsarethusavoidedtoobtmnphotolithogr

4、aphi。paRernswithgoodqualityPhotolithographyaconventionalmethodforthefabricationofbinaryopticalparts，possessesthereliabilityandhighprecisionInthethesis，theprocedureforthedesignofphotomasksisexplainedindetail，andtheprocess

5、esofphotoresist—coating，exposureanddevelopmentarealsodiscussedTheeffectsofvariousprocessparametersonthequalityofphotolithographicpatternsarestudiedIntheanalysisresults，somecontrolstrategiesareputforwardReactiveionbeametc

6、hing(RⅢE)isakeytechniqueforthetransferoftheprofileofbinaryopticalcomponentsTheeffectsofvariousparametersonthecomponents’mouldingarestudiedThecontrolmethodofetchingrateofSisubstrateiSmainlydiscussedandmeasuresthatcombinet

7、hemereionetchingandreactiveionetchingarepresentedfortheexactcontroloftheetchingdepthInaddition，themodificationforerrorsofetchingdepthisexploredThethesisalsointroducessomeresearchonverticalerrorsandlateralerrorsinvolvedin