平面線圈感應耦合等離子體中射頻電場穿透及功率沉積的理論研究.pdf

1、大連理工大學碩士學位論文平面線圈感應耦合等離子體中射頻電場穿透及功率沉積的理論研究姓名：錢丹娜申請學位級別：碩士專業(yè)：等離子體物理指導教師：王友年20060601蘭耍垡鬯壁查塑魚墅墮王笪!!!塑皇塑塑墨墊堊嬰墮堡塑壅ResearchonElectricFieldPenetratiOnandPowerAbsorptioninPlanarTypeInductiVelyCoupledPlasmaDischargeAbstractTheindu

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3、smas(TcP)，thisp印erstudiesthecharacte“sticsoftheradio—frequency(rf)electric丘eldandpowerabsorptionintheplasmaFirstly，as鯽metheTadiusRofthedischaTgechamberismuchla曙eTthanitsheightL，wethencaIluseonedimensionalslabmodeltosIudv

4、the口enetrationbehavioroftherfelectricfieldintheplasmaUsingthelinearBoltzmannequatjonandMaxwellequatjons，andassumingthattheelectronenergydjstribufionfunction(PDFF)obeystheBoItzmanndistribution，wepresentgeneralexpressionso

5、ftherfelectricfieldandpowerabsoIption，discusstheiIlfluenceofthedischargepressureandelectrontemperatureonthesetwoquantiljes，andfindtheanomalousskind印thisabout2cmNext，weusefurmerthethetwodimensjonalmodeltoconsidertheradial

6、changesoftherfelectricfieldandthepowerabsorptjonEspecially，westudytheinfluenceoftheradialdistributionofthecoilpositionsontherfelectricfieldFinallywegiveasetofself_consistentequationstodescribetheinteractionsoftherfelecIr

7、icfieldwiththeplasma，namely，dete肌inelheEDFFandtherfeIectricfieldconsistentlyWichthehydrodynamicmodel，tllispaperstudiestheeffectsofthecharge_exchangec01lisjonsbet、veenionsandneutralsonthedirectcunentbiasedvoltagesheathsFo

8、Ttheplanartarget，jtisshownthatthesheaththiclmessbecomessmallasthecollisionalpar啪eterjncreasesAfittedexpressionoftheChild—LangIlluir1awfortlleplanarsheathispresentedbasedonthenumerica王resultsInaddition，theinnuenceofmetarg