基于eM-Plant的虛擬自動組合裝置(Cluster Tool)的實現(xiàn).pdf

1、廣東工業(yè)大學碩士學位論文基于eMPlant的虛擬自動組合裝置（ClusterTool）的實現(xiàn)姓名：李飛申請學位級別：碩士專業(yè)：機械電子工程指導教師：伍乃騏20090501廣東T業(yè)大學碩士學位論文AbstractSemiconductorindustryplaysallimportantroleinthenationaleconomyandtechnologyInordertohavebetterquaHtycontrolandteduc

2、ethewaferfabricationleadtime，thereisanincreasinguseofintegratedmanufacturingequipmentsuchasclustertoolsthatintegrateseveralprocessingmodulesfordifferentprocessstepswithtransfermoduleItispredictedthatmorethanthirtynewwafe

3、rfabricationproductlineswillbebuiltinChinainthenexttenyearsHoweveritnotonlylacksselfdevelopedequipmentandprocesstechnologytobuildsuchsystems，itisalsoagreatchallengetowelloperatesuchsystemsMoreoverwhileequipmentandprocess

4、technologyCanbebought丘omforeigncountries，theoperationofthesesystemsshouldbedonebyourselvesThus，researchforhowtooperatethesesystemsshouldbecarriedout，includinghowtoscheduleandcontrolthesesystemsExtensivestudyhavebeendonei

5、ntheoptimizationandcontrolproblemofwaferfabricationwhichisoneofthemostcomplexmanufacturingsystemsUptonowdomesticstudiesmainlyfocusedonthemodelingandschedulingforthewafermanufacturingsystemlessresearchattentionispaidtothe

6、operationofclustertoolsOntheotherhand，someresearchersoutsideofChinahavebeendedicatingtothestudyontheoperationofclustertoolsNevertheless，duetesidencytimeconstraintsandactivitytimevariationofclustertools，theschedulabilitya

7、nalysisandschedulingproblemsofclustertoolsarestillopenWithwaferresidencytimeconstraintsandrevisitinginclustertoolsforsemiconductorfabricationtheschedulingandcontrolproblemofclustertoolsisverycomplexandthefeasibilityofasc

8、heduleandcontrolpolicycannotbecheckedanalyticallyHoweveravirtualclustertoolCanbeservedforthispurposeMotivatedbythis，avirtualclustertoolforcontrollertestingisdevelopedbyusingeMPlantItisaparameterizedandthree—dimensionalmo