用于波像差檢測的二元光柵掩模標(biāo)記優(yōu)化方法研究.pdf

1、華中科技大學(xué)碩士學(xué)位論文用于波像差檢測的二元光柵掩模標(biāo)記優(yōu)化方法研究姓名：王麗娟申請學(xué)位級別：碩士專業(yè)：機(jī)械電子工程指導(dǎo)教師：劉世元20110117華中科技大學(xué)碩士學(xué)位論華中科技大學(xué)碩士學(xué)位論文IIAbstractWavefrontaberrationsofprojectionlensinopticallithographicsystemsareanimptantindicatofaffectingthestepper’sperfman

2、ce.WiththegradualincreaseofNAthewavefrontaberrationsofprojectionlensmeetmestrictdemtoensurethequalityoftheimagewhichrequiressomefurtherresearchontheprinciplesmethodsofmeasurementtechniquefwavefrontaberrationsinlithograph

3、ictools.Duetotheadvantageofeasierproducinglowercostbinarygratingmaskhavebeenwildlyusedinaberrationmetrologytechniques.Asetofbinarygratingmarkswithdifferentpitchesientationswhicharesensitivetowavefrontaberrationscandecrea

4、sethepropagationoferrsinZernikecoefficientssothattheaberrationmetrologymethodmaintainsahighaccuracyestimateofwavefront.Inawdtheoptimizationmethodofbinarygratingmaskiscrucialinaerialimagebasedaberrationmeasurementtechniqu

5、es.AccdingtopartialcoherentilluminationtheythewavefrontaberrationsconceptmethodsthedetectionprocessesfinsituaberrationmeasurementinopticallithographicsystemsaregeneralizedbycombiningtheimagingmodelstheinverseproblemofZer

6、nikecoefficients.BasedonerrpropagationtheysensitivityanalysisthecostfunctionsoftheoptimizationproblemfdifferentconditionsareproposedindividuallybyanalysisthesensitivityofopticaberrationstoTCC(transmissioncrosscoefficient

7、)aerialimageintensity.TakingcoherentsourceilluminationconditionasanexampleasuitableoptimizationmethodisedfromcomparingtheConstraintOptimalDirectMethodConstraintOptimalIndirectMethod.theresultsfpartialcoherentillumination

8、areshowninthispaperusingtheedmethod.TheoptimizationprocessiscalculatedbyMatlabprogrammingthesimulatProlith.Meanwhiletheaberrationmeasurementresultsfoptimizedmaskstherommasksarecomparedineachilluminationsourceseparately.T

9、heaccuracyofsimulationwkhasdemonstratedthattheresultsobtainedbytheoptimizedgratingmasksaremuchbetterthanthosebytheromones.Theresultsverifythefeasibilityoftheoptimizationmethod.Keywds:wavefrontaberrationsinsituaberrationm