基于相移剪切的非球面測試改進方案研究.pdf

1、西安工業(yè)大學碩士學位論文基于相移剪切的非球面測試改進方案研究姓名：劉丙才申請學位級別：碩士專業(yè)：光學工程指導教師：田愛玲20080430StudyonImprovedMethodofAsphericSurfaceTestingBasedonPhaseshiftingShearingInterferometryDiscipline：OpticalEngineeringStudentSignature：“諺喲洲superv；s。rs；gna

2、ture：孑溯∥班；礦AbstractPhaseshiftingShearingInterferometryisanimportanttechnologyofopticalmeasurementwhichobtainsthefringeinformationandthephasedistributionofwavefrontrealtimeItgreatlyimprovedthetestingprecisionforasphericsu

3、rfaceAimingatvibrationsensitivityofphase—shiftingshearinginterferometertheimprovedmethodwhichisstudiedbysimulationandexperimentisproposed，then，theprocessingmethodofshearinginterferogramsandsoftwarearefurtherstudiedTheres

4、earchworksasfollows：TheprincipleofthreedifferentsimultaneousphaseshiftingmethodsisderivedbyJonesMatrixrespectivelyAfterdiscussingtheadvantagesanddisadvantagesamongthethreemethods，phase—shiftingshearinginterferometerisimp

5、rovedbydiffractiongratingsplitterandphase—shiftingwaveplateInmeasuringsystem，firstly4diffractedbeamsof(1，1)ordersareformedforthesamediffractingefficiencybyatwodimensionalsinegratingSecondlythroughpolarizationphase—shifti

6、ngarrayfourinterferogramswhichhave90degreephaseshiftingintervalsareobtainedsimultaneouslyFinallythefourinterferogramsCanbecapturedbyoneCCDSimulationandexperimentwhichincludethediffractedcharacteristicoftwodimensionalsine

7、gratingandphase—shiftingcharacteristicofwaveplatearecarriedoutItisprovedthatsimultaneousphase—shiftinginterferometryisfeasibleAfterthemanipulationofinterferogramsbasedonvirtualshearingtheoryisdiscussed，itisnotapplicablei

8、nprocessoflateralshearinginterferogramsBasedonvirtualshearinginterferometryavalidwayofremovingadjustmenterrorswhichaffectmeasurementresultofwavefrontisproposedAccordingtoZernikepolynomialalgorithm，therelationbetweenshear