1、南京理工大學(xué)碩士學(xué)位論文石墨微結(jié)構(gòu)磁電效應(yīng)及甚小電阻信號(hào)讀取姓名：季兆林申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：機(jī)械電子工程指導(dǎo)教師：王志明20090525AbstractAsthemicromationtendencyinIntegratedCircuitandMicroElectroMechanicalSystemsbecomemoreandmoredearthelimitationsofsiliconinapplicationaregradual
2、lyembodiedsuchasinhi曲temperature，hi曲frequencyfields，andpeoplebegintopayattentiontonewsubstitutematerialGraphitepossessesexcellentelectrical，magneticmechanicalandthermalcharacteristicsandhasgreatpotentialinmanyareasespeci
3、allyinIntegratedCircuitandMicroElectroMechanicalSystemsAndithasbeentakenseriouslybytheindustrialandscientificcommunityoftheSiliconValleyintheUnitedStatesInthisdissertationtheelectronicstructureofgraphiteanditsnumeroussup
4、eriorpropertiesarebrieflysummarizedandthepotentialapplicationsofgraphiteinmagneticactuatorsandelectroniccompassinMEMSareanalyzedAccordingtomagneto—resistiveeffecttheoryonthebasisofanalyzingkindsofpreparationtechnologyofg
5、raphiteinMEMS，thisdissertationdevelopsamechanicalcleavingprocesstogetthegraphitesample，bringsforwardagraphiticschemewhichissimilartosiliconwaferdesignsaspecificMEMSorientedgraphificCrossmicrostructureWithhighresolutionmi
6、croscopeandfourpointproberesistancemeasurementtechnologyasuitablesampleiselectedinordertoetchthemicrostructureofgraphiteInthisdissertation，correspondingcircuittestsystemisdesigned，underwhichtherelationbetweenthegraphitic
7、MEMSmicrostructure，current，voltageandvacuumaswellastheinfluenceofmagneticfieldonoutputvoltagearestudiedThisdissertationresearchestheconductivityofgraphitemicrostructureunderdifferentvacuumlevelsaswellasitspropertiesunder
8、otherextremeconditionsThebalancestateoftheMEMSmicrostmctureofgraphiteandthecontrolofmagneticfieldontheoutputvoltageofgraphiticmicrostructureareachievedthroughexperimentsAndthequantumHalleffectisobservedSomeexploratorywor
9、kaboutminiaturizationapplicationofgraphitehasbeendoneinthisdissertationInaddition，aimedatmeasuringthesmallresistanceofgraphite，anadjustablemicro—voltagedetectiondeviceisdesignedAndtheexperimentaldatademonstratesthefeasib