選擇性化學(xué)鍍鎳實驗研究.pdf

1、I脹：DC5：蘭!蘭冀j(luò)i垃東南大碩士掌位論文選擇性化學(xué)鍍鎳實驗研究研究生姓名：童丞照導(dǎo)師姓名：撻睦齷豇數(shù)撞墮重3熬援￡|【請學(xué)位級別—』型越匾一學(xué)科專業(yè)名稱—j刪盤是盤玨理吐一f、論文提交日期29Q生!且論文簪辯目期—墊堂皇望月r皇t且—～學(xué)位授予單位盔畝太掌學(xué)位擐予吲期二__墊鯉圭L童——且一答辯蠶員會主席—』龜鱉堡—一評閱^————垂超墮=——。，二二二耋婆噩L一2006年3月AbstractExperimentalResearc

2、honSelectiveElectrolessNickelPlatingByYuanChengchanSupervisedbyLinXiaohniandChanYonfciMechanicalEngineeringDepartmentSoutheastUnivzrsityAbstractEk℃trolessplatingplaysanimportantroteinmodernsarf∞eengineeringElectrolessdep

3、ositiOllisa$t1rfaceamocamly虹credoxprocessPrctrcatmantofthesubstratesurfacehasadecisiveinfluenceduringthewholeprocessC㈣tly。electrolessdepositionofn把詛_lshasmanyapplicationsinmicroandnanotechnologiesn塘investigationsofnanosu

4、tlctLlleSfabricatedonsiliconwaferforthedevelopmentofnanodeviceshavebeenreportedsuccessivelyInthiswork鋤experimentofselectiveelectrolessnickeldeposifiononsiliconwaferinaqueoussolutionwascarriedouLSelectiveNidepositionwaSpe

5、rformedbyusinglasefablatingprocessThismethodpresentsarelativelysimpleprocessforfabricationofnighaspectratiomcmUicstructuresE1cctrolessmethodsoffernighquaJityultraihinfilmsthatarecompatiblewithhighresolutionpatternsinphot

6、osensitivepolyimideprocessAwiderangeofstudieshaveinvestigatedtheelectrolessnickel(EN)platingmechanism。SeveralreactionpathshavebeenproposedwhichweredevelopedfromplatingrammeasurementsDespitethelargenumberofinvestigationst

7、hedepositionkineticsissofarnotwellestablishedAnempiricalrateequationbasedonnonsteadystatediffusionoftheelectrolessNiplayershasbe∞developedElectrolessnickel(El∞depositionbathisknowntohaveamajorproblemofsuddenbathdecomposi

8、tionwnichresultsin鋤increaseintheoperatingcostoftheprocessandthegenerationofenvironmentallyhazardouswasteBathstabilizersarenormallyaddedtoextenditslifeAproperstabilizationsTstemwillprohibittheselfdecompositiontoenhancAthe