溶膠-凝膠法制備ATO透明導(dǎo)電薄膜的光電性質(zhì).pdf

1、華中科技大學(xué)碩士學(xué)位論文溶膠凝膠法制備ATO透明導(dǎo)電薄膜的光電性質(zhì)姓名：鄧志兵申請學(xué)位級別：碩士專業(yè)：微電子學(xué)與固體電子學(xué)指導(dǎo)教師：張道禮20060331華中科技大學(xué)碩士學(xué)位論文ABSTRACTFilmtechniquesbelongtoaninterdisciplinarysubject，whosedevelopmentandapplicationarerelatedtoalmostallthefieldsInthisthesis，t

2、hinfilmsofantimonydopedtinoxidewithgoodopticalandelectricalpropertieshavebeendepositedbythesol—geldipcoatingmethodbyusinginorganicmetalsaltsSnCl2’H20andSbCl3asprecursorsThecrystallinemicrostructuresandsurfacemorphologies

3、ofas—preparedATOfilmswereobservedandanalyzedbytheXraydiffraction(XRD)，atomforcemicroscope(AFM)andopticalmicroscopeTheopticaltransmissionofthefilmswasmeasuredbyUV—visiblelightspectrophotometeranditsinfluencingfactorsaredi

4、scussedWeexplainedtheexperimentalprocessandprincipleoftheATOthinfilmspreparedbysol—gelmethodonglasssubstrateinroomtemperature，anddiscussedthegrowthmechanismofATOfilms，Ithasbeenfoundthattheheat—treatmenttemperature，filmth

5、icknessandSbdopinglevelhavestronginfluencesonthemicrostructuresandcompositionofSn02filmsWjmtheincreaseoftheannealingtemperatureandfilmthickness，thecrystallinityofthefilmsisimprovedandthegrainsizesbecamelargerTheSn02cryst

6、alsexistmainlyaStetragonalrutilestructure，despiteofsomerhombicSnOcrystalsattemperatureof500。CTheanalysisoftheopticalandelectricalpropertiesoftheATOthinfilmderivedbysolgelprocessindicatedthatproperSbdopinglevel(10m01％)wou

7、ldsignificantlyincreaSetheconductivity，butalsomaintainthehighvisiblelighttransmissionWiththeincreaseofthefilmthickness，thesheetresistanceandthetransmissivitywouldobviouslyreduceLikelythehigherannealingtemperaturewouldres

8、ultinthereductionofthesheetresistance，buthadlittleeffectsOnvisiblelighttransmissionTheATOthinfilmsdepositedbysolgeldip—coatingtechniquehavegoodtransmission(85％)andlowsheetresistance(120Q／D)bychoosingtheproperprocessingpa