射頻激勵(lì)CO-,2-激光器的流道設(shè)計(jì)與反射鏡變形分析.pdf

1、華中科技大學(xué)碩士學(xué)位論文射頻激勵(lì)CO激光器的流道設(shè)計(jì)與反射鏡變形分析姓名：張焱申請(qǐng)學(xué)位級(jí)別：碩士專(zhuān)業(yè)：物理電子學(xué)指導(dǎo)教師：唐霞輝20090501華 中 科 技 大 學(xué) 碩 士 學(xué) 位 論 文 華 中 科 技 大 學(xué) 碩 士 學(xué) 位 論 文 Abstract The thesis aims to study the cooling water flow channel of the slab electrode, and the defo

2、rmation and compensation of the reflector for RF-excited diffusion-cooled CO2 laser. Through simulating the electrode and reflector of RF-excited CO2 laser, an optimum flow channel of the electrode has been analyzed and

3、designed. By using temperature compensation, the thermal deformation of the reflector has been corrected. The main content includes the following aspects: (1) According to the structure and thermal environment of the ele

4、ctrode, the electrode’s heat transfer has been calculated and analyzed, and the finite element theory of temperature field has been discussed. (2) U-shaped、s-shaped、snake-shaped and improved snake-shaped projects for flo

5、w channel of the slab electrode have been designed. Then the temperature fields of the electrode have been simulated. By comparing the results, the improved snake-like-shaped project has been proved to be the optimum flo

6、w channel. When using this kind of flow channel, the radiating effect was excellent, the average temperature of the whole electrode was 28 , and the ℃ cooling requirement of the electrode has been met. (3) According to

7、the question of the thermal deformation of the reflector, the finite element theory of the reflector’s thermal deformation has been analyzed. By using the method of numerical simulation, the thermal deformation and compe

8、nsation of the reflector has been calculated, and the influence on the quality of the output laser beam caused by the change of the curvature of the reflector has been analyzed. It has been proved that the effect of temp

9、erature compensation is obvious, and can correct the thermal deformation of the reflector to the tolerance of the parameter of optical cavity. By the simulation analysis of the slab electrode and reflector for RF-excited