磁控濺射高頻脈沖(a39;2k)電源的研制

1、中南民族大學(xué)碩士學(xué)位論文磁控濺射高頻脈沖（AK）電源的研制姓名：劉亞東申請學(xué)位級別：碩士專業(yè)：等離子體物理指導(dǎo)教師：孫奉婁20080501磁控濺射高頻脈沖（A2K）電源的研制IIAbstractOnthebaseofreadingmanyliteraturesinvestigationseveraldifferentsputteringtechnologieswerecompared.AimedatthespecialtiesofPul

2、seMagronSputtering(PMS)TechnologythechokepointofPowerSupplyTechnologytherequirementsofthepowersupplyparameterswereproposed.Thedetailparametersarethatthefrequencyisupto300kHzthenegativevoltagecanbevariedbetween0V500Vthene

3、gativepeakcurrentcanbereached2Amperestheplusvoltagecanbevariedbetween0V100Vthepluspeakcurrentcanbereached1AmperethenegativeDutyRatiocanbevariedbetween10％60％.Indertoimplementtherequirementsofthepowersupplyparametersthedif

4、ficultiesofthepowersupplywhichwouldbedesignedwasanalyzed:Asaresultoflimitationofpowerelectronicscomponentthecomponentthatthevoltagevaluecurrentvaluethefrequencyresponsemeettherequirementsishardlyfoundexpensive.Therefesta

5、rtingfromtopologythewholesolutionfthepowersupplywasproposed.ThewholesolutionwasthatthepowersupplywascomposedoftwoindependentDCDCconverters(usedfregulatingplusvoltagenegativevoltagerespectively)onechopper(usedffmingpluspu

6、lse)aninvertfrequencydoubledsystem(usedffmingnegativepulse).Theceisthematchingofinvertfrequencydoublingsystemthechopper.Theproblemsofpowerelectronicscomponentwassolvedtosomeextenttherebyitmadeachievingpowersupplyparamete

7、rindexpossible.Accdingtotheoverallsolutionadetaileddiscussionofchoosingtopologyfmaincircuitchoiceofpowerdevicedesignofmagicdevicechoiceofsnubbercircuitdesignofcontrolcircuitdesignofdrivingcircuit.Aftercomparingthemeritth

8、edisadvantageofallkindsoftopologiesaspowersupplyparametersindexrequiredthefullbridgetopologythefwardtopologywaschosenusedfnegativeplusvoltageregulationrespectively.Thefullbridgetopologywasalsochosenusedfinvertfrequencydo

9、ublingsystembutthesecondwindingscurrentwouldberectifiedbydiodePowerMOSFETwhichcanblockshtcircuitwhenthepluspulsewasturnedon.OwingtothecircuitwksinhighfrequencythePowerMOSFETwaschosenaspowerswitch.TheinfluenceofMillereffe

10、cttodrivingsignalthesolutionweredescribed.Thefunctionofthesnubbercircuitthechoiceofitsparameterswerealsodiscussed.Theproblemsthedetailedprocessofsolvingtheseproblemsindebuggingthepowersupplyweredescribedonengineeringexpe

11、rience.RealtimewavefmsweretestedbyoscilloscopetheinfluenceofMillerEffectwasverified.Bymeansofdetectingtheloadvoltagecurrentwavefmthedesignindexesofpowersupplywereachievedfunctionallythepowersupplycanbeusedfdosomeexperime