28243.觸發(fā)型真空弧離子源放電特性研究

1、觸發(fā)型真空弧離子源放電特性研究獨創(chuàng)性聲明本人聲明所呈交的學位論文是我個人在導師指導下進行的研究工作及取得研究成果。據(jù)我所知，除了文中特別加以標注和致謝的地方外，論文中不包含其他人已經(jīng)發(fā)表或撰寫的研究成果，也不包含為獲得中國工程物理研究院或者其他單位的學位或證書所使用過的材料。與我一同工作的同志對本研究所做的貢獻均已在論文中做了明確的說明并表示了謝意。學位論文作者簽名：萬綱司簽字日期：7口／午年4月／口日學位論文使用授權的說明本學位論文作

2、者完全了解并接受中國工程物理研究院研究生部有關保存、使用學位論文的規(guī)定，允許論文被查閱、借閱和送交國家有關部門或機構(gòu)，同時授權中國工程物理研究院研究生部可以將學位論文全部或部分內(nèi)容編入有關數(shù)據(jù)庫進行檢索，可以影印、縮印或掃描等復制手段保存、匯編學位論文。學位論文作者簽名：猾簽字日期：歷7可年牛月／013導師簽名：簽字El期：函c少年緲月fo日觸發(fā)型真空弧離子源放電特性研究AbstractThetriggeredvacuumarcions

3、ources(TVAIS)beenintensivelyusedtoprovidehighcurrentionbeamsinfilmdepositionandmaterialsurfacemodificationparticleaccelerationinjection，plasmathrusterandfundamentalnuclearphysicsstudies，primarilyduetothelowbreakdownvolta

4、ge，higharCcurrentandhighrepeatabilityOnthebasisofthereviewonthecurrentdevelopmentsofdischargetheories，triggeringmechanismsandtriggereddischargemodesfortheTVAIS，thepropertiesoftheTVAISbasedonthehigh—voltagesurfaceflashove

5、rdischargemodearestudiedbyusingbothexperimentalandsimulativeapproachesInanattempttofurtherunderstandthemechanismofthehighvoltagesurfaceflashoverdischarge，theelectricfielddistributionandtheelectronandiontemporaldistributi

6、onsinthedischargeprocessaresimulatedbyusingparticleincell(PIC)methodontheassumptionthatinitialelectronemissionbasedontheFowlerNordheimformula，SecondaryElectronEmissionAvalanche(SEEA)theoryandtheimpactionizationmodelforad

7、esorbedgaslayeronaceramicinsulatorsurfaceTheimagesofsecondaryelectronmultiplicationandoccurringofbreakdowninthesurfaceflashoverprocessareacquiredThecharacteristicsoftheTVAISsuchasthetriggervoltage，arCburningvoltageanddel

8、aytimeareobtainedfordifferentmaterialsandgapdistancesResultsshowthatthetriggeredtimedelayoftheionsourceismainlyaffectedbythetriggeringstructure，triggeringcurrentdensityandtriggeringvoltageThereexistlittlecorrelationswith

9、themaingapdistanceandthemaingapvoltageThetriggervoltageisintherangeof7—11kVTheburningvoltageofmainarCisabout30VTheactiondelaytimeisabout20nsfromthebeginningofthetriggerpulsetothetimethatthemaingapvoltagebeginstodecline，w

10、hiletheconductiondelaytimeis130—210nsfromthestartingpointofthemaingapvoltagedecliningtothetimethatthemaingapvoltagestabilizes，andincreaseswiththedistanceofthemaingapThedischargemechanismisstudiedbycombiningahighspeedfram

11、ingcamerawithhiglltemporalspatialresolutionsanddischargeparametermeasurements；theinfuenceofcathodespotsformationandplasmadiffusionontriggeredvacuumarcdischargearealsodiscussedThephotographsofdischargeprocessanddischargeg

12、apareperformedThefactorsinfluencingdischargearealsoanalyzedThetotalioncurrentoftriggeredionsourceismeasuredusingflatprobediagnosticmethodTheresultsdemonstratethestructureoftheionsourceexertsasignificantinfluenceontheionc