斐索型同步移相干涉測(cè)試技術(shù)研究.pdf

1、聲明本學(xué)位論文是我在導(dǎo)師的指導(dǎo)下取得的研究成果，盡我所知，在本學(xué)位論文中，除了加以標(biāo)注和致謝的部分外，不包含其他人已經(jīng)發(fā)表或公布過的研究成果，也不包含我為獲得任何教育機(jī)構(gòu)的學(xué)位或?qū)W歷面使用過的材料。與我一同工作的同事對(duì)本學(xué)位論文做出的貢獻(xiàn)均已在論文中作了明確的說明。研究生簽名：邀起立6r7年3月3日學(xué)位論文使用授權(quán)聲明南京理工大學(xué)有權(quán)保存本學(xué)位論文的電子和紙質(zhì)文檔，可以借閱或上網(wǎng)公布本學(xué)位論文的部分或全部內(nèi)容，可以向有關(guān)部門或機(jī)構(gòu)送交并

2、授權(quán)其保存、借閱或上網(wǎng)公布本學(xué)位論文的部分或全部內(nèi)容。對(duì)于保密論文，按保密的有關(guān)規(guī)定和程序處理。研究生簽名：一齷一2?！?年≥月3日Abs訂act碩士學(xué)位論文AbstractSimultaneousphaseshiftinginterferometryisthebestmeasuremethodinantivibrationfieldAtpresent，mostofthesimultaneousphase—shiftingschemes

3、usetheTwyman—typestructure，madFizeau—typeinterferometerissuitablefordetectingplanecomponentThereareseveralFizeautypestructuresarenotsuitableforlong—cavityinterferometryForthepurposeoflongcavityinterferometryanewmethodofs

4、imultaneousphaseshiftinginterferometryisproposedinthispaperThesystembasedontheFizeauphase—shiftinginterferometermeasurementsystemandusingaquarterwaveplateasareferencemirrorapairoforthogonalpolarizedlightareacquiredAfterc

5、rossingtheRonchiphasegrating，diffractedbeamsof(士1r土1)ordersareformedinthesamediffractingefficiencywhichselectedbyaspecialapertureThefourdiffractedbeamsobtain4phase—shiftingofn／2throughaphasedelayarrayandapolarizingplateT

6、heprincipleoffizeausimultaneousphaseshiftinterferometerbasedonthequarterwaveplateisanalyzedbyJonesmatrixThekeydevicesofthissystemaredesignedandconstructedfromtheaspectsofinterferencesystem，spliaingsystem，phase—shiftingsy

7、stemanddataacquisitionsystemAplaneismeasuredandtheresultsareagreedwiththemeasurementresultsoftheZYGOinterferometerThedifferenceofpeakandvalleyis0004kandtherootmeansquareerroroftheplanesystemis0001kTheerrorofeachcomponent

8、isanalyzed，especiallythephaseshifterrorofthequarterwaveplate，thepositionerrorofthefastaxis，theazimutherrorofthepolarizerandthephase—shiftingerrorofthephasedelayarrayTheoverallerrorofthedeviceisL／10Itcansimplifythestructu

9、reofthesystem，reducethesystemerrorsuitableforthemeasurementoftheplaneandeasiertOinstallationcomparingtotheTwymansimultaneousphaseshiftinginterferometryItissuitableforthemeasurementoflong—cavityinterferometryandcarleffect