基于仿真技術(shù)的半導(dǎo)體生產(chǎn)系統(tǒng)調(diào)度研究.pdf

1、上海交通大學(xué)碩士學(xué)位論文基于仿真技術(shù)的半導(dǎo)體生產(chǎn)系統(tǒng)調(diào)度研究姓名：顧華平申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：機(jī)械設(shè)計(jì)及理論指導(dǎo)教師：莫錦秋20050201SchedulinginSemiconductManufacturingBasedonSimulationMethodAbstractThesemiconductmanufacturinghasbecomeaveryimptantindustrytheschedulingplanningofsem

2、iconductmanufacturingsystemisplayingarolebecauseofdrasticcompetitionrapidupdateofproductsequipments.Thedisquisitionfocusesonthebasicaspectsofcurrentsemiconductmanufacturingsystemincludingthesetuptimebetweendifferentprodu

3、ctsinthesameequipmentreasonableprocessingbatchsystematicadjustmentunderthecircumstanceofdowntime.Thesemiconductmanufacturingsystemisatypeofdiscreteeventdynamicsystemthedisquisitionwillbuildupmodelstoanalyzethesystemperfm

4、ancewithdiscreteeventsimulationaccdingtotherequirementofpracticalschedulingpolicy.Theintegratedruleschedulingpolicyfocusesonsemiconductmanufacturingsystemwithmanykindsofproducts.its’mainobjectiveissatisfyingdifferentdemf

5、rommarketavoidingoutofstockbecauseofvibrationofmarketgivingpriitytotheurgentproducts.Whenakindofequipmentprocessesdifferentwkitneedsasetuptime.Theintegratedruleschedulingpolicynotonlyfocusesonthereducingofsetuptimebutfoc

6、usesonthebalanceofdifferentequipments.Thebatchprocessplaysdifferentroleintheutilizationofequipmentcycletimeofproductstheissueofreasonablebatchsizeisanoptimizingmethodunderthetwokindsofrestrictivecondition.Thedisquisition

7、optimizesthesemiconductmanufacturingsystemperfmancegivingdifferentadditionfactaccdingtothepracticalmanufacturingconditionavoidingcomplexmodeling.Itprovidesanewtooldealingwithreasonablebatchsizeinthesemiconductmanufacturi

8、ngsystem.Theprocessingequipmentsinthesemiconductmanufacturingindustryareallverypreciseneedsplentyofmaintainingthedevelopmentofnewproductsnewprocessesthetrainingofnewhiringemployeesneedtakingalotofpracticalprocessingtime.

9、Aswelltheseequipmentscoulddownduringthepracticalmanufacturing.Theabovefactswillplayanegativeroleinthesystematicperfmanceinthepracticalmanufacturing.Itprovidesanewmethodthedynamicsystematicadjustmentmethodtoreducethenegat

10、iveeffectbecauseofalltheseunavoidableabnmalsituationofequipmentsimprovingtherobustnessofthemanufacturingsystem.Thedisquisitionalsovalidatesthenecessitypracticabilityofdynamicsystematicadjustmentmethodthroughbuildingupsim

11、ulationmodelsaccdingtopracticalmanufacturingcell.Thedynamicsystematicadjustmentmethodwhichisproposedinthedisquisitionprovidesanewtooltoanalyzesolvetheissuesofschedulingpolicyinsemiconductmanufacturingsystem.KeywdsReentry