單晶爐橫向磁場設(shè)計與優(yōu)化.pdf

1、西安理工大學(xué)碩士學(xué)位論文單晶爐橫向磁場設(shè)計與優(yōu)化姓名：劉飛航申請學(xué)位級別：碩士專業(yè)：微電子學(xué)與固體電子學(xué)指導(dǎo)教師：高勇安濤20080301西安理工大學(xué)碩士學(xué)位論文DesignandOptimalofTransverseMagneticFieldofMonoCrystalFurnaceMajor：MicroelectrouicandSolidElectronicsName：FeihangLiuSupervisor：ProfYongGaoS

2、eniorEngineerTaoAnAbstractSignature：Signature：Signature：銣陟纊艫細(xì)Thescientificresearchofsiliconsinglecrystalmaterialispronetohighpurityhighintegrityanduniformity，bigdiameterwiththefastdevelopmentofICandPVindustrialsHighquali

3、tylargediametersiliconcrystalcanbeobtainedbyapplyingtransversemagneticfieldonthemeltsilicontosuppressthemeltconvectionsInthispaperthemodeloftransversemagneticfieldinthesix—inchsinglecrystalfurnaceisbuiltandanalyzedbyfini

4、teelementmethod，basedonwhichthedesignparametersareoptimizedFirstthemeltconvectionsandthecauseofimpuritynonuniformityduringthegrowthprocessareanalyzed，theprincipleofmagneticfieldsuppressmeltconvectionsisintroduced；thenthe

5、structure，characteristicsandworkingprincipleareexplained；thenthemodelisbuiltwiththesoftwareANSYS，themodelprovedtobecorrectandCanbeusedforthedesignandoptimizationoftransversemagneticfieldaftersimulationandanalysis；atlastt

6、hedesigndiametersandactualizeplanareobtained，includemagneticintensitydistributionanduniformity，coilturns，radiusofiron，widthandheightofmagneticpoleandsectionareaofwireere，thepowerconsumptionisalsooptimizedtobelittlebyanal

7、yzingtherelationbetweencoilturns，sectionareaofwire，current，currentdensityandpowerthroughsimulation，whichprovidesaconvenientandreliablesimulationmethodandconclusionswithsignificantreferencevalueforthedesignoftransversemag