硅微電容式、隧道式加速度計(jì)檢測(cè)技術(shù)研究.pdf

1、圖書分類號(hào)UDC3’密級(jí)韭窒碩士學(xué)位論文硅微電容式、隧道式加速度計(jì)檢測(cè)技術(shù)研究王玲指導(dǎo)教師(姓名、職稱)型焦塾攫申請(qǐng)學(xué)位級(jí)別王主亟專業(yè)名稱疆蜜堡噩廈塑煎論文提交日期一!旦!!年璺月!!日論文答辯El期2111年一生月一21日學(xué)位授予El期——年——月——日論文評(píng)閱人答辯委員會(huì)主席2007年4月23日中北大學(xué)學(xué)位論文Theresearchondetectiontechnologyofcapacitanceaecelerometerandt

2、unnelingaccelerometerAbstractWiththedevelopmentofthesiliconmicromachiningtechnique，thesiliconaccelerometerhasalreadytakenupconsequenceinthe∞nsormarketThedevelopmentofsensortechnologyneedprecisionperipherydetectioncircuit

3、sOneofthehotspotsistheweaksignaldetectionofsiliconmicrosensor’SsignalThemicrominiaturizedcircuitryisneededtomicrosensorTheinevitabletrendistheintegrationofcircuitThispapcr’Sresearchonthehotspotofsiliconmicroaccelerationc

4、apacitanceaccelerationandthetunnelingaecelerometertheweaksignaldetectioncircuitweredesigned，testedanddemarcatedIno“l(fā)ertoimprovethedetectionprecisiontheaccelerationanddetectioncircuitwb豇eintegratedbythethickfilmmixtureint

5、egrationtechnologyAccordingtothecombcapacitanceaecelerometer’ssensormechanics，thedifferencedetectioncircuitWaSdesignedInordertoimprovethelinearityandme蠲urerange，theclosedloopfeedbackcontrolcircuitwasadoptedTheresolutionh

6、asreached10一”FAfterjoiningthecapacitanceaccelerationandthedetectioncircuit，testedthesensor’SstaticstateanddynamiccharactertheresultisquitewellThetunnelingeffectisintroduced，whichisthetunnelingacceleration’Sdetectionprinc

7、ipleIdidtheopenlooptestofthetunnelingaceelerometerwhichWaSfabricatedbypekinguniversityIdidthesimulinksimulationtoguidetheparameterenactmentofdetectioncircuitThethreeaxistunnelingaecelerometerweretestedanddemarcated，Tothe