雙線振動硅微機(jī)械陀螺儀檢測技術(shù)研究與試驗.pdf

1、東南大學(xué)碩士學(xué)位論文雙線振動硅微機(jī)械陀螺儀檢測技術(shù)研究與試驗姓名：武強(qiáng)申請學(xué)位級別：碩士專業(yè)：精密儀器及機(jī)械指導(dǎo)教師：李宏生20080501ABSTRACTTheSiliconmieromachinedvibratorygyroscope(SMG)isanewkindofgyroscopes，whichisallimportantresearchbranchofMEMS(MicroElectromechanicalSystem)With

2、themeritsofsmallvolume，lightweight，lowcost，lowpowerconsumption，highreliabilityandSOontheSMGhasgreatpotentialityofapplicationinthefieldsofinertialmeasurementTheresearchworkisbasedonsliconmicromaehinedlinearvibratorygyrosc

3、ope，whichWasdesignedbyourresearchgroupItsdetectingtechnologyisstudieddeeplywhichcontainsschemetheoryanalysis，schemesimulation，andthedesignofkeycircuitmodulesThedetectschemeofdoubledifferenceopenloopisimplemented，whichisb

4、asedoncoherentsignaldetectiontheoryAndtheperformancetestsisfinishedMainresearchcontentsareasfollows：(1)Themotionlawandworkmechanismofsiliconmicromachinedlinearvibratorygyroscopeisanalysed，andthemathematicalexpressionabou

5、tthemotionlawofthedrivingmodeandsensemodeisinducedBasedonthem，themathematicalexpressionaboutthesensecapacityisalsoinduced(2)Accordingtothecharacteristicsofsiliconmicromachinedlinearvibratorygyroscopesignaldetection，quadr

6、atureerrorandnoisesareanalyzed，thenthemethodofcoherentsignaldetectionisadoptedThedouble—padsoutputdifferentialopenloopdetectingschemeandthecommon—padoutputdifferentialopenloopdetectingschemearecompared，whicharebothbasedo

7、nthetheoryofcoherentsignaldetectionThedouble—pads—outputdifferentialopenloopdetectingschemeisusedinthispaperandtheschemeperformancesiSsimulatedandestimated(3)Thepreamplifiercircuitofsiliconmicromachinedlinearvibratorygyr

8、oscopedetectingcircuitisstudiedTherelationbetweenthecomponentsofthepreamplifieranditsnoiseperformanceisanalyzed，andtherelationbetweenthecomponentsofthepreamplifieranditsdynamicerrorperformanceisalsostudiedBasedontheseana

9、lyses，thedeterminatedesignprincipleofthepreamplifierispresentedWiththedesignexperienceofthepreamplifierinthispaperanquantitativedesignprincipleofthepreamplifierispresentedAtlastthepreamplifierofthispaperisgiven(4)Thedoub

10、lepadsoutputdifferentialopen—loopdetectingschemeisimplementedbyPCBcircuits，whichisbasedonthecoherentsignaldetectiontheoryTheprimaryperformancesoftheimplementedcircuitsaletested，inchludingscalefactorzerorate，zeroratedrift