光學(xué)薄膜的橢圓偏振模型分析與數(shù)據(jù)處理研究.pdf

1、南京理工大學(xué)碩士學(xué)位論文光學(xué)薄膜的橢圓偏振模型分析與數(shù)據(jù)處理研究姓名：王衛(wèi)申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：光學(xué)工程指導(dǎo)教師：王青20060601碩士論文光學(xué)薄膜的橢廈偏振模型分析及數(shù)據(jù)處理研究AbstractEllipsometryis妣opticalanalyticaltechniqueusedtodeterminetheoptiealconstantsandthefillthicknessfrommeasurementsofthechang

2、einpolarizationstateofreflectinglightIthastheadvantagesofremarkablesensitivitynondestructivecharacterandetcHoweverwecannotgetthefilmparametersdirectlybecausetheellipsometerequationisatranscendentalequationWeCanhardlygett

3、heanalyticalsolutionforfilmparametersfromthemeasuredellipsometricparametersPand4ThereforetofindallalgodthmtoinversethemeasureddataF鋤dAbecomesaprimarybutimportantproblemInthisdissertationwetakearesearchoftheprocessofspect

4、roscopicellipsometrydataThemaintaskincludesthreepartsFirstconstructingamodel(includingstructuralmodelandopticalfunction)ofopticalthinfilmsystemisdiscussedAccordingtothemodelcalculationweanalyzethesensitivityregionofellip

5、sometricparameterswithrespecttofilmparameters(refractiveindex珂extinctiontoe仿cientkandthickness力andincidentangleSecondweintroducetheSimulatedAnnealingalgorithmtothedataprocessingAnddesigningandwritingthedataprocessingprog

6、ramThird，wemeasurethestandardthinfilmprovidedbytheellipsometermanufactureandsamplesmadebyourselvesAndgoodresultsareobtainedbyllsillgtheSimulatedAnnealingalgorithmKeywords：Opticalthinfilm；Ellipsometry；Opticalconstant；Film