薄膜-基體系統(tǒng)界面裂紋及翹曲問題研究.pdf

1、分類號：UDC：密級：編號：工學碩士學位論文lIIIIIIIIIIIIIIIlIIHlFrrrlrlrlrlllJY1437402薄膜／基體系統(tǒng)界面裂紋及翹曲問題研究碩士研究生指導教師學位級別學科、專業(yè)所在單位論文提交日期論文答辯日期學位授予單位：劉志偉：孫秋華教授：工學碩士：固體力學：航天與建筑工程學院：2008年5月：2008年6月：哈爾濱工程大學哈爾濱工程大學碩士學位論文AbstractAsakindofsurfacetechno

2、logyfilm／substratesystemisdevelopedquicklyandwidelyusedinseveralengineeringfieldsFilm／substratesystembelongstomultilayeredstructureTheobviousdifferencesbetweenlayersinmechanicalpropertiesandthesurfacesareimportantcharact

3、ersforthistypeofstructureSothemechanicalbehaviorsexhibitedinthisstructurearedifferentfromthatinconventionalmaterialstructureinworkingtimeSuchas，plasticdeformation，debonding，buckling，spallingandcrackingandSOonAllofthesewi

4、llaffecttheworkingefficiencyandlifeoffilm／substratesystemWiththeexploitationandapplicationofthethinfilmdevices，itismoreandmoreimportanttesearchthemechanicalpropertiesoffilmandfilm／substratesystemsWithregardtothisproblem，

5、themainresearchitemsinthisdissertationareaSfollows：1TheinterfacestaticpropagatingcrackwasdetailedlystudiedfirstlyThroughtheasymptoticanalysisofthecracktipfield，theexponentsofsingularityofstressandstrainininterfacestaticp

6、ropagatingcrack—tipfieldweredeterminedEmbarkingfromthefundamentalequationandcombiningwiththeanalysisonthesingularityofcracktipfields，theasymptoticgoverningequationswerededucedWithsoluting—deteriminingconditions，thestress

7、，strainanddisplacementfieldsnearthetipofmodeIandIIcrackwerealsoobtainedbyusingtheshootingmethodandthevariationtrendofthefieldswithdifferentparametersWasdiscussedFromtheasymptoticsolutionofthecracktipfields，theparametersc

8、ontrollingthepartialcrackingweresearched，Theresultscanprovidetheoreticalbaseforestablishingofthedamagecriterion2ThebucklingproblemswereresearchedsecondlyandthedelaminationphenomenonWasresearchedfurtherusingtheresultsbase